JPS62128660U - - Google Patents
Info
- Publication number
- JPS62128660U JPS62128660U JP1582886U JP1582886U JPS62128660U JP S62128660 U JPS62128660 U JP S62128660U JP 1582886 U JP1582886 U JP 1582886U JP 1582886 U JP1582886 U JP 1582886U JP S62128660 U JPS62128660 U JP S62128660U
- Authority
- JP
- Japan
- Prior art keywords
- laser tube
- excimer laser
- laser oscillator
- gas flow
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1582886U JPS62128660U (en]) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1582886U JPS62128660U (en]) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62128660U true JPS62128660U (en]) | 1987-08-14 |
Family
ID=30807122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1582886U Pending JPS62128660U (en]) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128660U (en]) |
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1986
- 1986-02-07 JP JP1582886U patent/JPS62128660U/ja active Pending